Far rear surface focusing of femtosecond laser pulses for dicing display glass plates

摘要

A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and repetition rate of 1 kHz is used for introducing the cavities.