Batch Patterning Micro Circuits and Sensors with Excimer Laser Machine

摘要

This paper will present the direct photo patterning of micro circuits and sensors with a XeCl excimer laser photo ablation system. The working principle and the ablation equipment for photo ablation of conductive thin film on polymer are described. Both large sheets and reel-to-reel webs can be ablated on this excimer laser photo ablation system. The ablation strategies and alignment strategies for the micro circuits and sensors are introduced. The test results show ablation results with high resolution, high throughput, high yield and cost-efficiency. This clearly shows that excimer laser photo ablation of the conductive materials on polymer substrates is a good choice for industrial mass product fabrication of low priced, disposable micro circuit and sensor devices.