Computer Microvision and Its Application for Mems Testing~*

摘要

We nave developed a computer microvision system that combines video microscopy and computer vision for MEMS testing. The system makeup and measurement algorithm are described in detail. The results of applying this system for MEMS testing are presented and well consistent with the real value. With friendly user interface and significantly faster and simpler testing methods, this system can be used for MEMS testing practically. Some improvements to this system are being made continually.