Quantification Method of Trace Amines in Cleanroom Atmosphere by Capillary Electrophoresis-Mass Spectrometry Following Filter Sampling

摘要

Amines are one of serious contaminants in cleanroom atmosphere and influence semiconductor manufacturing process not only as basic but as organic contaminants. Although analytical methods of trace amines in cleanroom atmosphere or process gas by ion chromatography (IC), liquid chromatography (LC), by gas chromatography (GC) and gas chromatography/mass spectrometry (GC/MS) have been investigated, these were unsatisfactory in detection limit and qualitative ability. In this paper, we report the quantification method of trace amines by capillary electrophoresis/mass spectrometry (CE/MS). The method is high-sensitivity and can apply to not only cleanroom air but also process dry gas. Furthermore, it can cover the quantitative and qualitative evaluation of all specified amines. The quantitative evaluation of trace amines on silicon wafer can be performed by this method.