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微传感器

微传感器的相关文献在1990年到2022年内共计457篇,主要集中在自动化技术、计算机技术、无线电电子学、电信技术、机械、仪表工业 等领域,其中期刊论文212篇、会议论文29篇、专利文献476094篇;相关期刊137种,包括仪表技术与传感器、中国机械工程、电子机械工程等; 相关会议25种,包括2013年中国卫星导航学术年会暨第四届“天衡导航·北斗杯”全国青少年科技创新大赛、第十二届全国敏感元件与传感器学术会议、中国生物医学工程学会成立30周年纪念大会暨2010中国生物医学工程学会学术大会等;微传感器的相关文献由824位作者贡献,包括马炳和、邓进军、廖小平等。

微传感器—发文量

期刊论文>

论文:212 占比:0.04%

会议论文>

论文:29 占比:0.01%

专利文献>

论文:476094 占比:99.95%

总计:476335篇

微传感器—发文趋势图

微传感器

-研究学者

  • 马炳和
  • 邓进军
  • 廖小平
  • 罗剑
  • 安范模
  • 朴胜浩
  • 苑伟政
  • 边圣铉
  • 黄庆安
  • 秦明
  • 期刊论文
  • 会议论文
  • 专利文献

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    • 孙宝云; 马炳和(指导)
    • 摘要: 流体壁面剪应力作为精确研究掌握流体流经固体壁面摩擦阻力的物理量,是反映边界层流动特性的最直接参量之一,其准确有效测量可以为飞行器气动性能优化、边界层复杂流动机理研究提供关键数据支撑。壁面剪应力由于具有量值小、动态性高、流动结构特征尺度小的特点,国内外一直无有效测试手段。
    • 杨依宁; 刘万成
    • 摘要: 微系统技术是以微纳尺度理论为支撑,微集成工艺为基础,并通过功能模块集成,实现单一或多种用途融合的综合性前沿技术.应用微系统技术对加速光电系统性能的全面提升、有效降低成本具有重要意义.以2019年度微系统领域关键技术进展为基础,讨论目前光电领域微系统技术的难点问题,为该领域研究人员提供参考.
    • 牛文举; 黄荣玉; 韩建强
    • 摘要: 为实现对微传感器输出的模拟信号进行实时采集和显示,提出了一种基于现场可编程门阵列(FPGA)的微传感器信号采集系统.系统由FPGA,24位高精度模/数转换芯片ADS1256和上位机构成.系统采用FPGA作为核心控制器,利用Verilog语言,对FPGA的普通I/O口进行编程,模拟串行外设接口(SPI)总线规范的信号时序,完成ADS1256的读写操作控制.通过RS—232串口通信将采集到的数据送入由Visual C++开发平台编写的上位机中,最终实现微传感器输出模拟信号的实时采集、显示和数据保存等功能.通过采集标准直流电压信号进行测试,测得采样误差小于0.03%.
    • 陈立伟; 黄璐; 曹欢
    • 摘要: Aiming at the problem that it is unable to provide satisfactory indoor positioning results by using global positioning system (GPS), this paper proposed an indoor positioning technology based on the mode of spatial information. By the perception for the characteristic information in space environment, an incremental way to build information was adopted, in combination with the Bluetooth iBeacon with low energy consumption and various sensor information, the characteristic information zone in space was taken as guidepost to correct the cumulative error of dead reckoning, finally, a stable and independent indoor positioning system was achieved. In order to verify the effect of the design ideas, this paper carried out a contrast test for the design, traditional pedestrian dead reckoning algorithm and iBeacon single-point corrected dead-reckoning algorithm, the final results are shown as follows: for the traditional pedestrian dead reckoning algorithm, the average error for hollow-square walking is 0.83 m, the average error for snake-shape walking is 0.95 m; for iBeacon single-point corrected dead-reckoning algorithm, the average error for hollow-square walking is 0.32 m, the average error for snake-shape walking is 0.30 m; for the revised dead-reckoning based on spatial information mode and environment perception means, the average error for hollow-square walking is 0.29 m, the average error for snake-shape walking is 0.09 m, the proposed system reached the standard of indoor positioning, in addition, the paper also verified the effectiveness of the new scheme and the pragmaticality of indoor positioning system.%针对全球定位系统GPS不能提供令人满意的室内定位结果,提出一种基于空间信息模式下的室内定位技术,通过感知空间环境中的特征信息,采用一种增量式信息构建方式,结合低功耗蓝牙iBeacon以及多种传感器信息,以空间中特征信息区为路标修正行航位推算累积误差,最终实现了稳定独立的室内定位系统.为了验证设计思路的效果,通过与传统行人航位推算算法和iBeacon单点修正航位推算结果迸行对比实验,最终结果表明传统航位推算回字形行走平均误差为0.83 m,蛇形行走平均误差为0.95 m;iBeacon单点修正回字形行走平均误差为0.32 m,蛇形行走平均误差为0.30 m;基于空间信息模式环境感知定位方式修正航位推算回字形行走的平均误差为0.29 m,蛇形行走的平均误差为0.09 m.达到了室内定位精度的标准,同时也验证了新方案的有效性以及定位系统的实效性.
    • 雷强; 高杨; 赵俊武; 吕军光
    • 摘要: The resonant sensors based on aluminum nitride double-ended tuning fork (AlN DETF) have the characteristics of small size,good stability and reliability,and fast response.In order to improve the sensitivity and resolution,it is necessary to analyze the influence of the structure parameters of vibrating beam on the sensitivity and signal power of AlN resonator.The multi-physics model of AlN DETF resonator was established to verify effect of single parameter on the sensitivity by pre-stressed eigenfrequency analysis.The relationships between signal power and length,width of vibrating beam were obtained by post-processing data of simulation results when the thickness remained constant.The results show that relative sensitivity and signal power are growing in opposite directions with the width or the length of the beam.Therefore,there is a design tradeoff between signal power and relative sensitivity of AlN resonator according to process and structure strength.The optimized AlN DETF resonator was simulated,and its sensitivity,signal power and Q value are 56 Hz/μN,6.8 × 10-4 nW and 958,respectively.%基于氮化铝双端固支音叉(AlN DETF)的谐振式传感器具有尺寸小、稳定性和可靠性好、时间响应快等特点.为了提高灵敏度和分辨率,需要分析AlN DETF谐振器的振梁结构参数对灵敏度和信号功率的影响.在有限元仿真软件中建立AlN谐振器的多物理场模型,进行预应力特征频率分析,仿真验证单个振梁结构参数对灵敏度的影响.在振梁厚度保持恒定的情况下,对仿真结果的数据进行后处理,得到信号功率与振梁长度、宽度的关系.结果表明,相对灵敏度、信号功率随振梁长度、宽度的变化趋势相反.因此,需要根据工艺水平和结构强度等因素,综合考虑AlN谐振器的信号功率和相对灵敏度,对两者进行权衡.仿真分析了优化后AlN DETF谐振器的性能,±10 μN范围内的灵敏度为56 Hz/μN,信号功率为6.8×10-4 nW,Q值为958.
    • 林智雄; 邹文平
    • 摘要: In order to solve the problems that the acceleration integration of light mechanical and electrical system is poor,and the sensitivity is low,this paper adopts acceleration sensor system design by using vibration protection and good stability of clamped beams.The circular cavity and straight waveguide are coupled to realize the design of micro ring resonator,parameters of length of the waveguide are applied to control stability,strength,etc.The intensity of resonance,optical amplification process,and fixed clamped beam system are analyzed theoretically,the wavelength is obtained;by the model analysis wavelength change of the micro ring resonator is detected.Sensing characteristics analysis shows that the micro ring resonator output light intensity of the resonant peak is high,the free frequency range is obviously small,and the method can measure the precision variation.Acceleration variation has a linear relationship with the output spectrum,the sensitivity of the acceleration sensor system designed can reach 50 pm/g.%为了改进微光机电系统中加速度集成化差、灵敏度低问题,采用过振保护、稳定性较好固支梁进行加速度传感系统设计.通过环形谐振腔和直波导耦合的方式实现微环谐振腔设计,利用控制波导长度参数实现耦合稳定性、强度等调节.理论分析了实现光强谐振、光放大的过程,固定的固支梁系统,得到了微环谐振腔波长,模型分析得出通过波长变化得到检测微环输出端的光谱变化.传感特性分析表明:微环谐振腔的输出光强谐振峰值高,自由频范围明显小,有利于测量高精度变化量;加速度变化量与输出光谱表现为线性关系,设计的加速度传感系统灵敏度可以达到50 pm/g.
    • 孙宝云; 马炳和; 邓进军; 姜澄宇
    • 摘要: Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement.In this paper, the research progress of thermal wall shear sensors is introduced.And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.%基于MEMS技术的热敏式微传感器为壁面剪应力的测量提供了重要手段.本文介绍了国内外热敏式壁面剪应力微传感器技术的研究发展现状,重点从硅基和柔性聚合物基2种结构角度,对其工作原理以及不同热敏式微传感器的结构、关键工艺和性能测试进行了分析.
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