Method of preserving metal cultural properties by ALD coating and metal cultural properties preservation apparatus with ALD coating

摘要

Disclosed is a method for preserving and processing metal cultural properties by ALD coating. The method for preserving metal cultural properties by ALD coating of the present invention comprises the steps of: (a) washing the surface of the excavated metal cultural properties; and (b) forming a ceramic thin film or a metal thin film by performing atomic layer deposition (ALD) on the surface of the metal cultural heritage to prevent corrosion and strengthen the surface of the washed metal cultural heritage. According to the present invention, by forming a ceramic thin film or a metal thin film with a thickness of 1 nanometer to several hundreds of nanometers on the surface of a metal cultural property through ALD, it is easy to control the thin film thickness, so that it is a homogeneous component along the elaborate and complex surface curvature of the metal cultural property. Corrosion protection can be improved by forming a thin film of uniform thickness and preventing defects such as pinholes that may remain in the thin film structure.