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SYSTEM FOR MONITORING ENVIRONMENT AND MONITORING METHOD BASED ON SYSTEM FOR MONITORING ENVIRONMENT

机译:环境监测系统及基于环境监测系统的监测方法

摘要

Embodiments provide a system for monitoring an environment and a monitoring method based on a system for monitoring an environment. The system for monitoring the environment includes: a sampling device, configured to collect environmental samples from the process areas and including a system sampling pipeline, the environmental sample containing air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas. In a period for a single sampling, a ratio between a time period for purging the system sampling pipeline using the air supply device and a time period for sampling by the sampling device is controlled to be 1:5.
机译:实施例提供了一种用于监测环境的系统和基于用于监测环境的系统的监测方法。环境监测系统包括:取样装置,配置为从工艺区域收集环境样品,包括系统取样管道,环境样品含有空气;分析装置,连接至所述系统采样管线的输出端,并配置为分析所采集的环境样本;以及供气装置,其连接至所述系统取样管道,并配置成提供吹扫气体并使用所述吹扫气体吹扫所述系统取样管道。在单次取样期间,使用供气装置吹扫系统取样管道的时间段与通过取样装置取样的时间段之间的比率控制为1:5。

著录项

  • 公开/公告号US2022082476A1

    专利类型

  • 公开/公告日2022-03-17

    原文格式PDF

  • 申请/专利权人 CHANGXIN MEMORY TECHNOLOGIES INC.;

    申请/专利号US202117504586

  • 发明设计人 XUBAO WANG;YUNXIAO DING;

    申请日2021-10-19

  • 分类号G01N1/22;G01N1/38;

  • 国家 US

  • 入库时间 2022-08-24 23:54:32

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