Method for edge mediation of a measuring object in optical measurement technology and coordinate measuring device

摘要

Method for edge measurement of a measuring object in optical measurement technology with at least the following steps:-Recording image data of the measuring object containing at least one edge with a light-dark transition, with intensity values extending over a certain range of values;Processing the intensity values of the range using a non-linear and/ or non-continuous function; and-Determine a position of a edge of the measuring object based on a standard evaluation using the processed intensity values,where the procedure is characterised by:the non-linear and/or non-continuous function chosen to process the intensity values, that the position of the edge of the measuring object is shifted in the direction of the dark area of the light-dark transition according to the standard evaluation of the processed intensities in relation to a standard evaluation of the unprocessed intensities, the processing process takes into account the non-linear and/ or non-continuous function properties all the more when processing the image data,the smaller the numerical aperture (NA) of the measuring object was chosen to capture the image data of the measuring object and the relationship between the consideration of the properties of the non-linear and/or non-continuous function and the selected numerical aperture (NA) of the measuring object also a non-linear and / or has a non-continuous relationship with the numerical aperture (NA) of the measuring lens.