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Narrow etched gaps or features in multi-period thin-film structures
Narrow etched gaps or features in multi-period thin-film structures
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机译:多周期薄膜结构中的窄蚀刻间隙或特征
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摘要
Multi-period thin-film structures exhibiting giant magnetoresistance (GMR) are described. Techniques are also described by which narrow spacing and/or feature size may be achieved for such structures and other thin-film structures having an arbitrary number of periods.
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