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Bump structure to prevent metal redeposit and to prevent bond pad consumption and corrosion

机译:凸块结构,以防止金属重新安装并防止粘接焊盘消耗和腐蚀

摘要

Various embodiments of the present disclosure are directed towards a semiconductor device structure including a bump structure overlying a bond pad. The bond pad is disposed over a semiconductor substrate. An etch stop layer overlies the bond pad. A buffer layer is disposed over the bond pad and separates the etch stop layer and the bond pad. The bump structure includes a base portion contacting an upper surface of the bond pad and an upper portion extending through the etch stop layer and the buffer layer. The base portion of the bump structure has a first width or diameter and the upper portion of the bump structure has a second width or diameter. The first width or diameter being greater than the second width or diameter.
机译:本公开的各种实施例涉及半导体器件结构,该半导体器件结构包括覆盖键合垫的凸块结构。 键合垫设置在半导体衬底上。 蚀刻停止层覆盖键合焊盘。 缓冲层设置在键合焊盘上并分离蚀刻停止层和键合焊盘。 凸块结构包括接触键合垫的上表面的基部和延伸穿过蚀刻停止层和缓冲层的上部。 凸块结构的基部具有第一宽度或直径,并且凸块结构的上部具有第二宽度或直径。 第一宽度或直径大于第二宽度或直径。

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