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Bump structure to prevent metal redeposit and to prevent bond pad consumption and corrosion
Bump structure to prevent metal redeposit and to prevent bond pad consumption and corrosion
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机译:凸块结构,以防止金属重新安装并防止粘接焊盘消耗和腐蚀
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摘要
Various embodiments of the present disclosure are directed towards a semiconductor device structure including a bump structure overlying a bond pad. The bond pad is disposed over a semiconductor substrate. An etch stop layer overlies the bond pad. A buffer layer is disposed over the bond pad and separates the etch stop layer and the bond pad. The bump structure includes a base portion contacting an upper surface of the bond pad and an upper portion extending through the etch stop layer and the buffer layer. The base portion of the bump structure has a first width or diameter and the upper portion of the bump structure has a second width or diameter. The first width or diameter being greater than the second width or diameter.
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