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FREE ELECTRON LASER RADIATION SOURCE FOR THE EUV

机译:用于EUV的自由电子激光辐射源

摘要

The electron bunch's passage through the LINAC in the acceleration phase of the electron bunch is coordinated with the electron bunch's passage through the LINAC in the electron bunch's deceleration phase. Each successive pair of electron bunches is spaced apart in time by an individual bunch interval according to a repeating electron bunch sequence. The electron source provides a clearing gap to the electron bunch sequence so that the undulator is free of ions. For each of the plurality of energy recovery LINACSs, and for all of the clearing gaps, according to the clearing gap sequence, the clearing gap passes through the LINAC respectively in an acceleration phase or a deceleration phase, a clearing gap is an acceleration phase or provide a clearing gap to maintain the energy recovery operation of the LINAC in coordination with the other of the clearing gaps passing through the LINAC in the deceleration phase.
机译:电子束的通过LINAC在电子束的加速阶段中的通道与电子束的通道通过LINAC在电子束的减速相中配位。 根据重复电子束序列,每个连续的电子束都通过单独的束间隔间隔开。 电子源向电子束序列提供清零间隙,使得波浪器不含离子。 对于多个能量回收线圈中的每一个,对于所有清零间隙,根据清除间隙序列,清除间隙分别在加速相位或减速阶段中通过LINAC,清除间隙是加速阶段或 提供清零间隙,以使LINAC的能量回收操作与在减速相中通过LINAC的另一个清除间隙的另一个。

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