Board processing device, board processing method, training data generation method, learning method, learning device, trained model generation method, and trained model

摘要

PROBLEM TO BE SOLVED: To appropriately dry a substrate to be processed while suppressing collapse of a pattern of a structure in the substrate to be processed. A substrate processing apparatus (100) includes a substrate holding unit (120), a processing liquid supply unit (160), an input information acquisition unit (22a), a sublimation drying processing condition information acquisition unit (22b), and the like. It is provided with a control unit (22). The input information acquisition unit (22a) acquires input information including at least one of the substrate information and the processing liquid information. The sublimation-drying processing condition information acquisition unit (22b) acquires sublimation-drying processing condition information indicating the sublimation-drying processing conditions for the substrate to be processed from the trained model based on the input information. The control unit (22) supplies the substrate holding unit (120) and the processing liquid so that the substrate to be processed is sublimated and dried based on the sublimation drying processing condition information acquired by the sublimation drying processing condition information acquisition unit (22b). The unit (160) is controlled. [Selection diagram] FIG. 4