首页> 外国专利> Chip-Scale Frequency-Comb Assisted Coherent LIDAR Ranging With Sub-Micrometer Precision

Chip-Scale Frequency-Comb Assisted Coherent LIDAR Ranging With Sub-Micrometer Precision

机译:芯片级频率梳理辅助连贯利达,亚微米精度测距

摘要

Systems and methods for soliton microcomb-based precision dimensional metrology via spectrally-resolved interferometry are described. In an embodiment, the system includes a dual-pumped soliton microcomb generator comprising a pump, a microresonator, and an auxiliary pump and that generates a single-soliton microcomb, an erbium-doped fiber amplifier that amplifies a C-band section of the soliton microcomb and a non-polarizing beam splitter that divides the soliton microcomb pulses into a reference arm pulse and a measurement arm pulse for an interferometer and recombines the reference arm pulse and the measurement arm pulse into a recombined beam upon their return.
机译:描述了通过光谱分辨的干涉测量的孤子微孔的精密尺寸计量的系统和方法。 在一个实施例中,该系统包括双泵浦孤子微磁模具发生器,包括泵,微管和辅助泵,并且产生单个孤子微电池,掺铒光纤放大器放大孤子的C波段部分 微块和非偏振分束器将孤子微锁脉冲分成参考臂脉冲和干涉仪的测量臂脉冲,并在其返回时将参考臂脉冲和测量臂脉冲重新结合到重组光束中。

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