METHOD AND SYSTEM FOR CORRELATING OPTICAL IMAGES WITH SCANNING ELECTRON MICROSCOPY IMAGES

摘要

Correlation of the optical image with the SEM image involves obtaining a full optical image of the sample by scanning the sample into an optical inspection subsystem, storing the full optical image, and determining the location of a feature of interest present in the overall optical image. identifying with the additional source, acquiring with the SEM tool an SEM image of the portion of the sample comprising the feature at the identified location, the optical image portion at the location identified by the additional source, the portion of the image comprising the reference structure; correlating the image portion and the SEM image based on the presence of the reference structure and the feature of interest in both the image portion and the SEM image, and forming a corrected optical image of the feature of interest in the SEM image. transforming the position of , into the coordinate system of the image portion of the entire optical image.