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TRANSPORT SYSTEM FOR MOVING A DEVICE IN A VACUUM PROCESSING SYSTEM, SUBSTRATE PROCESSING SYSTEM COMPRISING THE SAME, AND METHOD OF OPERATING A TRANSPORT SYSTEM
TRANSPORT SYSTEM FOR MOVING A DEVICE IN A VACUUM PROCESSING SYSTEM, SUBSTRATE PROCESSING SYSTEM COMPRISING THE SAME, AND METHOD OF OPERATING A TRANSPORT SYSTEM
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机译：用于在真空处理系统中移动装置的运输系统，包括相同的基板处理系统和操作运输系统的方法
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摘要
A transport system (100) for moving a device (10) in a vacuum processing system is described. The transport system (100) includes a drive unit (110) including a housing (120) encasing an interior space (121) having one or more electromagnets (130). Further, the transport system (100) includes a vacuum system (140) connected with the interior space (121) of the housing (120). Further, a substrate processing system including the transport system as well as a method of operating a transport system are described.
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