RARE EARTH OXYFLUORIDE SPRAY POWDER AND RARE EARTH OXYFLUORIDE-SPRAYED ARTICLE

摘要

The present invention relates to the rare earth element oxyfluoride particles having an aspect ratio of 2 or less, an average particle diameter of 10 µm or more and 100 µm or less, a bulk density of 0.8 g/cm 3 or more and 2 g/cm 3 or less, containing 0.5 mass% or less of carbon, and containing oxygen A rare earth element oxyfluoride powder spray material containing 3 mass% or more and 15 mass% or less is provided. According to the present invention, it is possible to obtain a rare earth element oxyfluoride powder spraying material suitable for plasma spraying in the atmosphere. The rare earth element fluoride spray member manufactured using the rare earth element oxyfluoride powder spray material of the present invention is more resistant to plasma etching than the rare earth element oxide or rare earth element fluoride spray coating when used as a plasma member in halogen gas. It is excellent in corrosion resistance and becomes a member capable of realizing a longer life.