首页> 外国专利> PROTECTIVE ELEMENT PULLER AND TAPE FASTENER

PROTECTIVE ELEMENT PULLER AND TAPE FASTENER

机译:防护元素拉链和胶带紧固件

摘要

An apparatus for peeling off a protective member from a workpiece, the protective member being attached to a first surface thereof, includes a chuck table that holds the workpiece from one side of a rear surface; a pull-out unit that pulls the protective member attached to the front surface of the workpiece held by the chuck table from the workpiece; a protective member detection unit that, after the protective member is peeled off by the peeling unit, detects whether or not the protective member is present on the front surface of the workpiece; and an alarm unit that outputs an alarm that the protective element detection unit has detected the protective element.
机译:一种用于从工件剥离保护构件的装置,保护构件附接到其第一表面,包括卡盘台,该卡盘台将工件从后表面的一侧保持; 拉出单元,其将附接到由卡盘桌子的工件的前表面的保护构件从工件中拉出; 保护构件检测单元,在通过剥离单元剥离保护构件之后,检测保护构件是否存在于工件的前表面上; 和警报单元输出保护元件检测单元检测到保护元件的警报。

著录项

  • 公开/公告号DE102021205461A1

    专利类型

  • 公开/公告日2021-12-02

    原文格式PDF

  • 申请/专利权人 DISCO CORPORATION;

    申请/专利号DE202110205461

  • 发明设计人 MASASHI KIMURA;

    申请日2021-05-28

  • 分类号H01L21/683;

  • 国家 DE

  • 入库时间 2022-08-24 22:17:17

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