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COMPOSITE SUBSTRATE AND PIEZOELECTRIC ELEMENT

机译:复合基板和压电元件

摘要

The composite substrate of the present disclosure has a piezoelectric substrate having a first surface and a second surface opposing the first surface, a support substrate having a third surface in contact with the second surface and a fourth surface opposing the third surface, and a through hole penetrating from the first surface to the fourth surface. The through hole has a tapered shape having a diameter decreasing from the first surface to the fourth surface and has a stepped surface having a decreasing diameter in the support substrate. The piezoelectric device of the present disclosure comprises the composite substrate and a conductor located within the through hole.
机译:本公开的复合基板具有具有第一表面的压电基板和与第一表面相对的第二表面,具有与第二表面接触的第三表面的支撑基板以及与第三表面相对的第四表面,以及通孔 从第一表面渗透到第四表面。 通孔具有锥形形状,该锥形具有从第一表面到第四表面的直径,并且具有在支撑基板中具有降低的直径的阶梯表面。 本公开的压电装置包括复合基板和位于通孔内的导体。

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