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VACUUM PUMP AND DAMPER FOR VACUUM PUMP

机译:真空泵真空泵和阻尼器

摘要

A vacuum pump and a damper for the vacuum pump are provided so as to increase vibration isolation in a twisting direction with a simple structure and prevent rupture of an O-ring and an elastic member by regulating a misalignment of flanges facing each other. Provided are a first flange and a second flange, each having a central opening, the flanges being shaped like rings opposed to each other; an O-ring and an intermediate ring that are disposed between the first flange and the second flange; O-rings disposed between the first flange and the intermediate flange and between the intermediate ring and the second flange; a plurality of elastic members that are disposed between the first flange and the second flange and are spread in the circumferential direction of central openings; and airtightness keeping means including positioning pins inserted into positioning holes sequentially provided on the first flange, the intermediate ring, and the second flange.
机译:提供真空泵和用于真空泵的阻尼器,以便通过简单的结构增加扭转方向的振动隔离,并通过调节彼此面对的凸缘的未对准来防止O形环和弹性构件的破裂。 提供的是第一法兰和第二凸缘,每个凸缘具有中心开口,凸缘形状像彼此相对的环; O形环和设置在第一法兰和第二凸缘之间的中间环; 设置在第一法兰和中间凸缘和中间环和第二凸缘之间的O形环; 多个弹性构件设置在第一凸缘和第二凸缘之间并且在中心开口的圆周方向上铺展; 并且气密性保持装置包括将销插入的定位销依次设置在第一法兰,中间环和第二凸缘上的定位孔中。

著录项

  • 公开/公告号EP3770443A4

    专利类型

  • 公开/公告日2021-12-01

    原文格式PDF

  • 申请/专利权人 EDWARDS JAPAN LIMITED;

    申请/专利号EP20190771455

  • 发明设计人 KAWASHIMA TOSHIAKI;

    申请日2019-03-13

  • 分类号F04D29/66;F04B37/16;F04D19/04;F04D29/08;F04D29/42;F04D29/52;F04D29/64;F16F15/08;

  • 国家 EP

  • 入库时间 2022-08-24 22:17:12

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