首页> 外国专利> Apparatus for producing Group-III nitride semiconductor crystal including nitrogen source nozzles with different spray directions

Apparatus for producing Group-III nitride semiconductor crystal including nitrogen source nozzles with different spray directions

机译:用于制造III族氮化物半导体晶体的装置,包括具有不同喷射方向的氮源喷嘴

摘要

An apparatus for producing a Group-III nitride semiconductor crystal includes a raw material reaction chamber, a raw material reactor which is provided in the raw material reaction chamber and configured to generate a Group-III element-containing gas, a board-holding member configured to hold a board in the raw material reaction chamber, a raw material nozzle configured to spray the Group-III element-containing gas toward the board, a nitrogen source nozzle configured to spray a nitrogen element-containing gas toward the board, in which, in a side view seen in a direction perpendicular to a vertical direction, a spray direction of the nitrogen source nozzle intersects with a spray direction of the raw material nozzle before the board, and a mixing part in which the Group-III element-containing gas and the nitrogen element-containing gas are mixed together is formed around the intersection as a center, a heater, and a rotation mechanism.
机译:用于制造基团-III族氮化物半导体晶体的装置包括原料反应室,其在原料反应室中提供的原料反应器,并且被配置为产生含基团的元素的气体,包括构造的板保持构件 为了将板载在原料反应室中,原料喷嘴构造成将含有群III元素的气体喷射到电路板,氮源喷嘴构造成将含氮元素的气体喷射到板上,其中 在垂直于垂直方向的方向上观察的侧视图中,氮源喷嘴的喷射方向与板之前的原料喷嘴的喷射方向相交,以及其中含有族元素的气体的混合部分 含氮元件的气体混合在一起,形成在作为中心,加热器和旋转机构的交叉口周围形成。

著录项

  • 公开/公告号US11186922B2

    专利类型

  • 公开/公告日2021-11-30

    原文格式PDF

  • 申请/专利权人 PANASONIC CORPORATION;

    申请/专利号US202016889852

  • 申请日2020-06-02

  • 分类号C30B35;C30B25/16;C30B29/40;C30B25/12;C30B25/10;

  • 国家 US

  • 入库时间 2022-08-24 22:15:50

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