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Rotation rate sensor, method for manufacturing a rotation rate sensor

机译:旋转速率传感器,制造旋转速率传感器的方法

摘要

A rotation rate sensor including a substrate, a drive structure, which is movable with regard to the substrate, a detection structure, and a Coriolis structure, the drive structure, the Coriolis structure, and the detection structure being essentially situated in a layer, in that an additional layer is situated essentially in parallel to the layer above or underneath the layer, a mechanical connection between the Coriolis structure and the drive structure being established with a first spring component, the first spring component being configured as a part of the additional layer, and/or a mechanical connection between the detection structure and the substrate being established with a second spring component, the second spring component being configured as a part of the additional layer.
机译:包括基板,驱动结构的旋转速率传感器,该驱动结构可在基板,检测结构和科里奥利结构,驱动结构,科里奥利结构和检测结构上基本上位于层中 附加层基本上位于层上方或下方的层,科里奥利结构与具有第一弹簧部件建立的驱动结构之间的机械连接,第一弹簧部件被配置为附加层的一部分 和/或用第二弹簧部件建立的检测结构和基板之间的机械连接,第二弹簧部件被配置为附加层的一部分。

著录项

  • 公开/公告号US11187528B2

    专利类型

  • 公开/公告日2021-11-30

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号US201816058228

  • 发明设计人 JOCHEN REINMUTH;ROBERT MAUL;

    申请日2018-08-08

  • 分类号G01C19/5747;G01C19/5762;G01C19/5712;B81B3;G01C19/5769;G01C19/5783;

  • 国家 US

  • 入库时间 2022-08-24 22:15:43

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