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TREATMENT METHOD AND TREATMENT SOLUTION FOR OBJECT OF INTEREST

机译:感兴趣对象的处理方法和处理解决方案

摘要

The present invention addresses the problem of providing a treatment method whereby the flatness of an object of interest having a metal layer can become superior when the method is applied to the object of interest. The present invention also addresses the problem of providing a treatment solution for an object of interest. The method for treating an object of interest according to the present invention comprises step A for subjecting an object of interest having a metal layer to an oxidation treatment to form a metal oxide layer and step B for bringing the object of interest obtained in step A into contact with a treatment solution to dissolve and remove the metal oxide layer, in which the treatment solution comprises an organic solvent and an acidic compound and the content of the organic solvent is 50% by mass or more relative to the whole mass of the treatment solution.
机译:本发明解决了提供治疗方法的问题,由此当该方法应用于感兴趣的对象时,具有金属层的感兴趣对象的平坦度可能变得优越。 本发明还解决了为感兴趣的对象提供治疗解决方案的问题。 根据本发明的处理物体的方法包括用于使具有金属层的感兴趣对象进行氧化处理的步骤A,以形成金属氧化物层和用于使步骤a中获得的感兴趣对象带来 与处理溶液接触以溶解和除去金属氧化物层,其中处理溶液包含有机溶剂和酸性化合物,有机溶剂的含量相对于治疗溶液的全质量为50质量%或更多 。

著录项

  • 公开/公告号WO2021166571A1

    专利类型

  • 公开/公告日2021-08-26

    原文格式PDF

  • 申请/专利权人 FUJIFILM CORPORATION;

    申请/专利号JPJP2021/002764

  • 发明设计人 MIZUTANI ATSUSHI;SUGISHIMA YASUO;

    申请日2021-01-27

  • 分类号C03C17/27;C09K13/06;H01L21/306;

  • 国家 JP

  • 入库时间 2022-08-24 20:50:09

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