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VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
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机译:阀装置,流体控制装置,流体控制方法,半导体制造装置和半导体制造方法
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摘要
A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess 23 of the valve body 2, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.
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