High brightness laser sustained plasma broadband radiation source

摘要

A pump configured to produce a high intensity laser sustaining broadband light source comprising a gas containment structure and illumination having a wavelength at least close to the weak absorption line of the neutral gas contained within the gas containment structure And a laser. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam within a generally elliptical beam waist located at or near the center of the gas containment structure. The broadband light source is configured to collect broadband radiation emitted by the plasma along a direction substantially aligned with the major axis of the elliptical beam waist, one or more first collection optics Have.