An embodiment of the present invention comprises: a sealed chamber into or out of which a container containing a material to be processed can be put or taken; a plurality of heaters which are provided in the chamber; a plurality of rollers which are rotatably provided in the chamber to convey the container; at least one pair of frames which support the opposite ends of the rollers outside the chamber; one or more sensors which are mounted to the frames to measure vibrations of the rollers; and a controller which detects failures of the rollers according to measurement values and installation positions of the sensors.
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