Microelectromechanical device with stopper

摘要

Problem to be solved: to provide a micro electromechanical device that newly improves measurement accuracy and reliability of the device.Microelectromechanical devicesA movable rotor 11 having a first rotor measurement region 111 made of silicon and a silicon stopper stopper region 112, andAdjacent to the rotorIncludes a stator stator 12 having a first stator measurement region and a status Topper regionThe rotor stopper regionIt is separated from the status Topper region by the stopper gap.Said rotorThe first rotor measurement region is mechanically connected to the rotor stopper regionElectrically isolate the first rotor measurement region from the rotor stopper regionThe second rotor isolation region 119 is formed of an insulating material.Diagram