Problem to be solved: to increase the breakdown resistance of the support layer when the conductive pattern is heated.In the negative direction of the first direction X of the conductive pattern layer 310, the conductive pattern layer 310 is formed in the negative direction side of the conductive pattern layer 310 in the negative direction of the first direction X, and a notch 312 opened toward the negative direction of the first direction X of the conductive pattern layer 310 is formed.In the positive direction of the first direction X of the conductive pattern layer 310, the conductive pattern layer 310 is formed in the positive direction side of the first direction X with a notch 312 formed in the positive direction side in the first direction X.The first pattern layer 320 in the first direction X in the first direction X of the conductive pattern layer 310 covers the notches 312 in the first direction X of the conductive pattern layer 310.The first pattern layer 320 on the negative side in the first direction X of the conductive pattern layer 310 covers the cut edge 312 in the first direction X of the conductive pattern layer 310.Diagram
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