Optical unit, optical device, and manufacturing method of optical unit

摘要

Problem to be solved: to provide an optical unit, an optical device capable of improving optical characteristics, and a method of manufacturing an optical unit.The optical unit 1 comprises a base 5 made of metal having a main surface 5S and a back surface 5R, an optical surface 20s provided on the main surface 5S, and a vibration element 30 provided on the main surface 5S or the back surface 5R.The base 5 has a support part 10, a first extending part 11 and a second extending part 12 extending from the support part 10, a movable part 15 disposed between the first extending part 11 and the second extending part 12, and a first connecting part 13 for connecting the first extended part 11 and the movable part 15, and the like; The second connecting portion 14 is connected to the second extending portion 12 and the movable portion 15.The vibration element 30 is provided on the support portion 10.The optical surface 20s is provided on the movable portion 15.At least a portion of the main surface 5S is formed with a lattice surface.Diagram