Micromechanical spring (10, 20), comprising at least two bar sections (11), which in the undeflected state of the spring are aligned essentially parallel to one another or have an angular width of less than 45 ° to one another, and one or more connecting sections (12) that connect the Connect bar sections (11) to one another, the bar sections (11) being displaceable relative to one another with respect to their longitudinal direction, and that the spring (10, 20) has an essentially adjustable, in particular linear, force deflection behavior in the direction of its bar sections (11), the spring (10, 20) coupling at least two micromechanical elements to one another or at least being coupled to a substrate (30) and for coupling each having a coupling area and / or at least one coupling element (1, 21, 22, 23), which in particular has at least an additional micromechanical spring element (21, 22, 23), wherein the additional spring element (21, 22, 23) is essentially rigidly coupled to the rest of the spring, characterized in that the micromechanical spring (10, 20) has at least one coupling element comprising at least one additional spring element (21, 22, 23), the spring stiffness of which changes within a defined deflection interval, wherein the entire spring (20) is designed in such a way that this changing spring stiffness of the at least one additional spring element (21, 22, 23) is compensated overall and the spring stiffness of the entire spring (20) with regard to a deflection essentially in the direction of its bar sections (11 ) is essentially constant within the defined deflection interval.
展开▼