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Apparatus with an embedded MEMS device and a method of making an embedded MEMS device

机译:具有嵌入式MEMS装置的装置和制造嵌入式MEMS装置的方法

摘要

Apparatus (1) comprising: an electrical component (18), a transducer (5) arranged adjacent to the electrical component (18), the transducer (5) being a microphone, a rear volume (12) next to the transducer (5), the rear volume (12) being a rear volume of the microphone, an encapsulation material (10) which contains the electrical component (18), the transducer (5) and a part encapsulates the rear volume (12), and a lid (16) which is arranged on the encapsulation material (10), whereby the rear volume (12) is sealed, the encapsulation material having etched holes (15) which penetrate through the lid (16) are sealed.
机译:装置(1)包括:电气部件(18),互换器(5)邻近电气部件(18),所述换能器(5)是所述透音器(5)旁边的麦克风(5)旁边的麦克风(5) ,后积(12)是麦克风的后积,封装材料(10)包含电气部件(18),换能器(5)和部件封装后积(12),以及盖子(如图16所示,布置在封装材料(10)上,由此密封后积(12),密封具有覆盖穿过盖子(16)的封装材料被密封。

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