Problem to be solved: in a liquid feeding system equipped with a rising portion, all remaining liquid before and after the rising edge can be discharged by a simple construction.Solution: connected to the bottom end of the preparation tankA first liquid feed passage 14a extending laterallySecond fluid passage 14b extending upward and extending upwardConnected to the second liquid feed passageThird liquid passage 14C extending sidewaysA small tank 18 connected to the third liquid feed passageA fourth liquid feed passage 14d connected to the small tankPreparation tank 12Air compressor 26 pressurizing small tankA first air vent passage 24C for reducing the small tank 18 is provided.A first liquid feeding mode in which the liquid is continuously fed from the preparation tank 12 to the fourth liquid feeding passage 14d through the small tank 18, and the second liquid feeding mode in which the liquid in the small tank 18 is fed into the fourth liquid feed passage 14d until the amount of liquid in the small tank 18 reaches a predetermined amount or less The liquid feeding mode is switched in the order of the third liquid sending mode in which the chemical liquid l remaining in the first to third liquid feeding passages 14a to 14C is sent to the small tank 18.Diagram
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