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Liquid feeding system and liquid feeding method

机译:液体进料系统和液体进料法

摘要

Problem to be solved: in a liquid feeding system equipped with a rising portion, all remaining liquid before and after the rising edge can be discharged by a simple construction.Solution: connected to the bottom end of the preparation tankA first liquid feed passage 14a extending laterallySecond fluid passage 14b extending upward and extending upwardConnected to the second liquid feed passageThird liquid passage 14C extending sidewaysA small tank 18 connected to the third liquid feed passageA fourth liquid feed passage 14d connected to the small tankPreparation tank 12Air compressor 26 pressurizing small tankA first air vent passage 24C for reducing the small tank 18 is provided.A first liquid feeding mode in which the liquid is continuously fed from the preparation tank 12 to the fourth liquid feeding passage 14d through the small tank 18, and the second liquid feeding mode in which the liquid in the small tank 18 is fed into the fourth liquid feed passage 14d until the amount of liquid in the small tank 18 reaches a predetermined amount or less The liquid feeding mode is switched in the order of the third liquid sending mode in which the chemical liquid l remaining in the first to third liquid feeding passages 14a to 14C is sent to the small tank 18.Diagram
机译:要解决的问题:在配备有上升部分的液体馈送系统中,上升沿之前和之后的所有剩余液体都可以通过简单的结构排出。解决方案:连接到制备罐第一液体进料通道14a的底端,延伸横向渗透流体通道14b向上延伸并延伸到第二液体馈送偏移液体通道14c延伸到第三液体饲料偏见的第四液体进料的侧向侧罐18连接到小型罐装罐12air压缩机26的通道14d,压缩机26加压用于还原小罐18的小罐子第一通气通道24c。第一液体供给模式,其中液体从制备罐12连续进给于第四液体馈送通过小罐18的通道14d,以及第二液体供给模式,其中小罐18中的液体进入第四液体进给通道14d,直到小罐18中的液体的量达到预定量或更少的液体馈电模式按照第三液体发送模式的顺序切换,其中化学液体L Re将第一至第三液体送入通道14a至14c的主要送入小罐18.diagram

著录项

  • 公开/公告号JP2021104826A

    专利类型

  • 公开/公告日2021-07-26

    原文格式PDF

  • 申请/专利权人 シブヤマシナリー株式会社;

    申请/专利号JP20190236308

  • 发明设计人 中村 真吾;水野 治;

    申请日2019-12-26

  • 分类号B67D7/72;B01J4;F17D1/20;

  • 国家 JP

  • 入库时间 2022-08-24 20:10:19

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