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Plasma assisted cleaning of engine room for chemical vapor deposition

机译:等离子体辅助清洁发动机室进行化学气相沉积

摘要

Engine room for plasma assisted chemical vapor deposition device,The utility model comprises a tray (P1, P2) made of conductive material, a chassis (12), and a compartment of each tray (P1, P2),Each compartment is opened on at least one surface of the chassis (12) for placing and removing pallets. The compartments are provided with pallet fixing devices to make the pallets (P1, P2) parallel to and away from each other, and to align the pallets (P1, P2) with each other, (P2) between each other, the holding device ensures that the first side of the pallet sees the second side of the adjacent pallet. The cabin also has a device for connecting a single electrical connection device to the generator connection circuit (8) so that two trays (P1,P2) adjacent, opposite polarity.Abstract figure: 1.
机译:用于等离子体辅助化学气相沉积装置的发动机室,本实用新型包括由导电材料制成的托盘(P1,P2),底盘(12)和每个托盘(P1,P2)的隔室,每个隔室打开底盘(12)的至少一个表面用于放置和移除托盘。隔室设置有托盘固定装置,以使托盘(P1,P2)平行于彼此平行,并且彼此之间的托盘(P1,P2)(P2)对准,保持装置确保托盘的第一侧看到相邻托盘的第二侧。机舱还具有用于将单个电连接装置连接到发电机连接电路(8)的装置,使得两个托盘(P1,P2)相邻,相反的极性。摘要图:1。

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