How to align multi beam irradiation systems

摘要

A method of aligning a multi beam irradiation system 20 for use in a device 10 for manufacturing a three-dimensional workpiece by irradiating a layer of raw material powder by electromagnetic or particle radiation, the methodI) radiation beam 24a emitted by irradiation systemThe first raw material powder layer is coated on the carrier 16 to define the irradiation plane s irradiated byII) the first test structure 34 is manufactured in the overlapped zone 18C of the irradiation plane s using the first radiation beam 24a emitted by the calibrated first irradiation unit 22a of the irradiation system 20, andIII) using the second radiation beam 24B emitted by the calibrated second irradiation unit 22b of the irradiation system 20, the second test structure 36 is manufactured in the overlap zone 18C of the irradiation plane s, andIV) first and second test structures 34 in the irradiation plane sOffset DXT between 36Measuring DYT andV) the first and second test structures 34, so that the offset does not exceed the thresholdMeasurement offset DXT between 36First and second configured irradiation unit 22a based on DYTAligning at least one of 22b and.