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Vacuum heating device and reflector device

机译:真空加热装置和反射器装置

摘要

Problem to be solved: to provide a vacuum heating apparatus having a reflector apparatus which does not cause damage due to thermal elongation.The plurality of unit reflector plates 31 arranged in the matrix are attached to the mounting surface 19 of the vacuum vessel 17 by the fixing device 21 and the holding devices 11a to 11d, respectively.When the respective unit reflecting plates 31 are irradiated with infrared rays, the unit reflecting plates 31 are thermally stretched around the mounting positions of the fixing devices 21 with the deformation of the deformation portions 64 of the holding devices 11a to 11d.The force applied to each unit reflecting plate 31 due to the thermal elongation is relaxed, and damage of the unit reflector plate 31 to the mounting surface 19 is prevented.
机译:要解决的问题:提供一种真空加热装置,其具有反射器装置,该反射器装置不会引起由于热伸长率而损坏。布置在基质中的多个单元反射板31附着到真空容器17的安装表面19上固定装置21和保持装置11a至11d。当相应的单元反射板31用红外线照射时,单元反射板31在定影装置21的安装位置围绕变形部分的变形热拉伸围绕定影装置21的安装位置围绕保持装置11a至11d的64。施加到每个单元反射板31由于热伸长率而被松弛,并且防止了单元反射板31的损坏到安装表面19。

著录项

  • 公开/公告号JPWO2020100376A1

    专利类型

  • 公开/公告日2021-06-10

    原文格式PDF

  • 申请/专利权人 株式会社アルバック;

    申请/专利号JP20200556616

  • 发明设计人 阪上 弘敏;大野 哲宏;

    申请日2019-08-26

  • 分类号F27B17;F27D7/06;F27D11/02;

  • 国家 JP

  • 入库时间 2022-08-24 19:08:48

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