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METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR MANUFACTURING A MOULD INSERT COMPONENT

机译:制造微机械部件的方法和用于制造模具插入部件的方法

摘要

Method of manufacturing a micromechanical component intended to cooperate with another micromechanical component, the method comprising the steps of providing a substrate, forming a mould on said substrate, said mould defining sidewalls arranged to delimit said micromechanical component, providing particles on at least said sidewalls, depositing a metal in said mould so as to form said micromechanical component, and liberating said micromechanical component from said mould and removing said particles.
机译:制造旨在与另一微机械部件配合的微机械部件的方法,该方法包括在所述基板上形成模具的基板的步骤,所述模具限定侧壁布置成限定所述微机械部件,在至少所述侧壁上提供颗粒,在所述模具中沉积金属以形成所述微机械部件,并从所述模具中解放所述微机械部件并除去所述颗粒。

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