TFT substrate, scanning antenna comprising TFT substrate, and method for producing TFT substrate

摘要

A TFT substrate includes a transmission and/or reception region including a plurality of antenna unit regions, and a non-transmission and/or reception region located in a region other than the transmission and/or reception region. Each of the plurality of antenna unit regions includes a TFT and a patch electrode electrically connected to a drain electrode of the TFT. The TFT substrate includes a source metal layer including a source electrode of the TFT, the drain electrode, and a source bus line, a gate metal layer formed on the source metal layer and including a gate electrode of the TFT and a gate bus line, a gate insulating layer formed between the source metal layer and the gate metal layer, an interlayer insulating layer formed on the gate metal layer, and a conductive layer formed on the interlayer insulating layer. The patch electrode is included in the gate metal layer.