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TESTING DEVICE AND METHOD FOR TESTING DIFFERENTIAL PRESSURE SENSORS

机译:测试差压传感器的测试装置和方法

摘要

The present invention provides a testing device that comprises a pressure chamber (107), means (108) for controlling the pressure in the pressure chamber (107), a chuck (101) inside the pressure chamber (107) for holding a sample (102) that comprises differential pressure sensors (103), and a probe card (104) inside the pressure chamber (107) for electrically contacting the differential pressure sensors (103). In the testing device according to the invention the chuck (101) comprises an air channel (110) having a first end in communication with the inside of the pressure chamber (107) and a second end in communication with the outside of the pressure chamber (107), wherein the first end is arranged in such a manner that the sample (102) when held on the chuck (101) closes the first end. The present invention also relates to a method for testing differential pressure sensors (103).
机译:本发明提供一种测试装置,该测试装置包括压力室(107),用于控制压力室(107)中的压力,压力室内(107)内的压力,用于保持样品的压力室(107)(102包括压差传感器(103),以及压力室(107)内的探针卡(104),用于电接触差压传感器(103)。在根据本发明的测试装置中,卡盘(101)包括空气通道(110),所述空气通道(110)具有与所述压力室(107)的内部连通的第一端和与所述压力室的外部连通的第二端(如图107所示,其中第一端以使得当保持在卡盘(101)上时的样品(102)关闭第一端。本发明还涉及一种用于测试差压传感器(103)的方法。

著录项

  • 公开/公告号EP3800457A1

    专利类型

  • 公开/公告日2021-04-07

    原文格式PDF

  • 申请/专利权人 AFORE OY;

    申请/专利号EP20190201475

  • 发明设计人 HENTTONEN VESA;

    申请日2019-10-04

  • 分类号G01L27;

  • 国家 EP

  • 入库时间 2024-06-14 21:24:35

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