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Manufacturing method of photodetector, photodetector, lidar device and photodetector
Manufacturing method of photodetector, photodetector, lidar device and photodetector
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机译:光电探测器,光电探测器,LIDAR装置和光电探测器的制造方法
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摘要
A photodetector includes a first cell for converting incident light into electric charges, the first cell including a first semiconductor layer, a second semiconductor layer and a first substrate interposing the first semiconductor layer with the second semiconductor layer; and a second cell for converting incident light into electric charges, the second cell including a third semiconductor layer, a fourth semiconductor layer, and a second substrate interposing the third semiconductor layer with the fourth semiconductor layer; wherein the second substrate is larger in thickness than the first substrate.
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