Method for manufacturing concave diffraction grating, concave diffraction grating and analyzer using the same

摘要

The groove period of the groove pattern of the diffraction grating and the position of the convex fixed substrate can be easily and accurately aligned.For this reasonFormed on planar diffraction gratingA groove pattern 103 having an unequal spacing groove period is transferred to the metal thin film 105A first alignment mark 109 is formed on a convex surface of a fixed substrate 108 having a convex surface for fixing the metal thin film 105The second alignment mark 106 formed on the adhesive surface of the metal thin film 105 isBy overlapping the first alignment mark 109PositionThe adhesion surface of the metal thin film and the convex surface of the fixed substrate are bonded to form a master 110.By transferring the groove pattern of the master 110 metal thin filmA concave diffraction grating 115 is formed.