首页> 外国专利> Method of manufacturing a device using a gold layer masking against a proton bombardment

Method of manufacturing a device using a gold layer masking against a proton bombardment

机译:使用针对质子轰击的金层掩膜制造器件的方法

摘要

A method of manufacturing a device in which a surface of a body is provided with a gold layer masking against a proton bombardment, in which the gold pattern is formed by means of a photoetching process, the gold pattern is removed after the subsequent proton bombardment of the body. The masking gold layer is obtained by providing on the body a quantity of gold simultaneously with a quantity of an addition which is small as compared with the quantity of gold.
机译:一种制造装置的方法,其中在主体的表面上设置有对质子轰击掩蔽的金层,其中,通过光刻法形成金图案,在随后的质子轰击之后去除金图案。身体。掩蔽金层是通过在主体上同时提供一定量的金和比该少量的金的添加量而获得的。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号