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AUTOMATIC MCLEOD TYPE VACUUM GAGE

机译:自动MCLEOD型真空计

摘要

PURPOSE:To automate measurement and recording, by driving a rotary mechanism by motors, by measuring the height of mercury by a vertical moving mechanism wherein an optical sensor is used, and controlling them by a microcomputer. CONSTITUTION:An entire rotary frame 6 is rotated by a stepping motor 5. A beam switch 7 is quietly lowered downward from the upper part of a glass tube 1 by a vertical driving stepping motor 10. When the beam switch 7 reaches the highest point of the mercury, the output of the beam switch 7 is turned ON, and the descending is stopped at this time. The position is measured by a length measuring magnetic sensor built in a supporting post 9. Based on the relationship between the preset position in a table and the vacuum degree, the value is searched, and the vacuum degree is selected. The series of operation controls are performed by a microcomputer 12. The measured result is printed or plotted on a printer or X-Y plotter 13.
机译:目的:通过用电动机驱动旋转机构,通过使用光学传感器的垂直移动机构测量汞的高度,并由微型计算机控制汞的高度,来自动进行测量和记录。组成:整个旋转框架6由步进电机5旋转。光束开关7通过垂直驱动步进电机10从玻璃管1的上部安静地向下下降。当光束开关7到达最高点时,此时,光束开关7的输出为ON,此时停止下降。该位置由安装在支柱9中的长度测量磁性传感器测量。基于表中的预设位置与真空度之间的关系,搜索值,并选择真空度。一系列操作控制由微计算机12执行。测量结果被打印或绘制在打印机或X-Y绘图仪13上。

著录项

  • 公开/公告号JPS5954935A

    专利类型

  • 公开/公告日1984-03-29

    原文格式PDF

  • 申请/专利权人 HITACHI SEISAKUSHO KK;

    申请/专利号JP19820163913

  • 发明设计人 SASAKI MITSUO;

    申请日1982-09-22

  • 分类号G01L21/04;

  • 国家 JP

  • 入库时间 2022-08-22 09:29:18

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