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High repetition rate, uniform volume transverse electric discharger laser with pulse triggered multi-arc channel switching
High repetition rate, uniform volume transverse electric discharger laser with pulse triggered multi-arc channel switching
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机译:重复频率高,体积均匀的横向放电激光器,带有脉冲触发的多弧通道切换
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摘要
A high power excimer laser emits a pulsed output at a high repetition rate in the ultraviolet wavelength region and a uniform power output across the laser beam. By subjecting doped silicon wafers to the pulsed laser output, epitaxial regrowth of silicon crystals can be induced to repair damage to the silicon crystal structure which normally occurs during implantation of the dopant materials.
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