PURPOSE:To measure a surface shape with high precision by observing interference fringes formed of reproduced body light reproduced by irradiating a hologram with reference light and illumination light which illuminates the hologram. CONSTITUTION:Parallel light from a laser light source 3 is split by a beam splitter BS; one piece of luminous flux is guided to a reference light optical system 4 to generate parallel reference light, which is made incident on the hologram HP to reproduce object light of divergent spherical wave light recorded on the hologram HP. The other piece of luminous flux is guided to an illumination light optical system 6 to generate parallel illumination light, which is reflected by the off-axis parabolic mirror surface MM to be inspected to generate a divergent spherical wave, which is made incident on the hologram HP. The illumination light deviates from the standard body under the influence of unevenness of the mirror surface MM, so the reproduced object light and illumination light form interference fringes. In this case, DELTAh=d/D.lambda/2, where D is the pitch of the interference fringes, (d) the deviation, DELTAh the shape error of the object surface, and lambda wavelength, DELTAh the shape error of the object surface, and lambda wavelength, so the error DELTA is calculated from the pitch D and deviation (d) to measure the surface shape of the mirror surface MM.
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机译：用途：通过观察由参考光和照亮全息图的照明光照射全息图而产生的复制体光形成的干涉条纹，以高精度测量表面形状。组成：来自激光光源3的平行光被分束器BS分开;一条光束被引导至参考光光学系统4以生成平行参考光，该参考光入射到全息图HP上，以再现记录在全息图HP上的发散球面波光的物体光。另一光束被引导至照明光学系统6以产生平行的照明光，该平行的照明光被离轴抛物面镜表面MM反射以被检查以产生发散的球面波，该球面入射到全息图上。生命值。照明光在镜面MM的凹凸的影响下偏离基准体，因此，再现物光和照明光形成干涉条纹。在这种情况下，DELTAh = d /D.λ/ 2，其中D是干涉条纹的间距，（d）偏差，DELTAh物体表面的形状误差，λ波长，DELTAh物体的形状误差因此，由间距D和偏差（d）计算出误差Δ，以测量镜面MM的表面形状。
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