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PROPER MIXTURE FOR PROCESSING PHOTORESIST COMPOSITION AND PROCESSING OF PHOTORESIST COMPOSITION AND METHOD OF PEELING PHOTORESIST FROM BASE BODY
PROPER MIXTURE FOR PROCESSING PHOTORESIST COMPOSITION AND PROCESSING OF PHOTORESIST COMPOSITION AND METHOD OF PEELING PHOTORESIST FROM BASE BODY
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机译:加工光致抗蚀剂组合物的合适混合物,光致抗蚀剂组合物的加工方法以及从基体上剥离光致抗蚀剂的方法
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摘要
1. Organic solvent for stripping and cleaning film bases provided with cured or uncured resin-like positive-working or negative-working photoresist mixtures and for diluting said photoresist mixtures, characterized in that it is composed of a mixture of about 1 to 10 parts by weight of propylene glycol alkyl ether acetate and about 1 to 10 parts by weight of propylene glycol alkyl ether.
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