MEMBER OF TREATED WITH FILM CONTAINING BOTH HALOGEN ATOM AND NITROGEN ATOM ON SURFACE AND SURFACE TREATMENT METHOD THEREOF

摘要

PURPOSE:To improve the wear resistance and lubricity of the bodies of parts to be subjected to mechanical sliding by housing the above-mentioned parts into a reaction vessel, introducing a halogen atom-contg. gas and nitrogen atom-contg. gas into the vessel and generating glow discharge under the reduced pressure. CONSTITUTION:Plural pieces of the bodies 14a-14n which are the parts such as the shafts of a compressor to be subjected to mechanical sliding and consist essentially of iron are attached to a support 13 of a base plate 12 and are heated to a prescribed temp. in the reaction vessel 11 of a film forming device 10. The halogen atom-contg. gas such as gaseous F2 and the nitrogen atom-contg. gas such as gaseous NH3 are introduced through a gas introducing pipe into the vessel and are diffused uniformly to the peripheries of the bodies 14a... through a concentrically disposed gas diffusing plate 17 and an electrode 16 bored with many holes. The glow discharge is then generated under the reduced pressure between the electrode 16 and the bodies 14a... by a high-frequency power source 18. The films contg. both the halogen atoms and the nitrogen atoms are thereby coated on the surfaces of the bodies 14a.... The wear resistance and lubricity of the bodies 14a... are thus improved without generating dimensional changes and the life thereof is extended.