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ARC COATING APPARATUS HAVING ARC IGNITION DEVICE

机译:具有电弧点火装置的电弧涂层装置

摘要

There is disclosed for a vacuum arc plasma generating system an ignition device that includes an elongated metallic member of length L with an inner edge juxtaposed a distance D from the edge of the target surface of the cathode. An insulating member with a bridging surface is formed preferably of a material such as boron nitride and is interposed such that the bridging surface connects between the ignitor member and the edge of the target surface. The ignitor member and insulating member may be ring-shaped to surround a circular target surface. The inner edge of the ignitor member preferably is formed of a multiplicity of teeth in contact with the bridging surface. An electrically conducting film is deposited on the bridging surface. A simple electrical connection is disposed between the ignitor member and the anode of the plasma system, making the ignitor member a supplemental anode. In onepreferred embodiment the length L is sufficiently large and the distance D is sufficiently small for the conducting film to evaporate upon imposition of the d.c. arc voltage between the cathode and anode, thereby initiating the arc without the need for an additional starter voltage power supply.
机译:对于真空电弧等离子体产生系统,公开了一种点火装置,该点火装置包括长度为L的细长金属构件,该细长金属构件的内边缘与阴极的靶表面的边缘相距距离D。具有桥接表面的绝缘构件优选地由诸如氮化硼的材料形成并且被插入使得桥接表面在点火器构件和目标表面的边缘之间连接。点火器构件和绝缘构件可以是环形的以围绕圆形目标表面。点火器构件的内边缘优选地由与桥接表面接触的多个齿形成。导电膜沉积在桥接表面上。在点火器构件与等离子体系统的阳极之间设置简单的电连接,从而使点火器构件成为辅助阳极。在一个优选的实施方案中,长度L足够大而距离D足够小,以使导电膜在施加直流电时蒸发。阴极和阳极之间的电弧电压,从而无需额外的启动器电压电源即可启动电弧。

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