PURPOSE:To enable electric discharge machining of microholes positioned with high precision, free from parallax error and without any contact, by positioning and drilling holes while observing a work-piece under a microscope located in the conjugate position with a slide table. CONSTITUTION:A workpiece 1 is set in the work pan 2, while a slide table 14 is moved until it bears on the left side stopper 31 and locked there. In such a condition, the workpiece 1 is located approximately below a machining electrode 4, where it is given a drilling process one time. In the next step, the electrode 4 is lifted and the table 14 is slided until it bears on the stopper 32 to be locked there by magnetic force. Nox, the workpiece 1 is located approximately below the microscope 12. The microscope 12 is moved by three directional slides 21a, 21b and 21c which are provided on the holder 20, so as to allow the cross point of the reticle 15 to coincide with the center of the drilled hole. Then, the slides 17, 29 are moved by means of feeding screws 18, 13 so as to adjust the drilled position to coincide with the cross point of the reticle 15 of the microscope 12. Drilling is carried out while applying the table 14 against the stopper 31.
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