INTEGRATED CIRCUITS EMPLOYING PROTON-BOMBARDED ALGAAS LAYERS

摘要

- 11 -INTEGRATED CIRCUITS EMPLOYING PROTON-BOMBARDEDA1GaAs LAYERSAbstractThe property of materials in the GaAs/AlGaAssystem, whereby at certain doses proton bombarded n-typematerial becomes highly resistive but p-type materialremains highly conductive, is utilized to fabrication ofintegrated circuits which include buried semiconductorinterconnections or bus bars between devices.