DRIVING METHOD FOR LAPPING AND POLISHING MACHINE FOR ROBOT LOADING/UNLOADING

摘要

PURPOSE:To stop the rotation of carriers and dissolve the displacement of works when loaded or unloaded by synchronously rotating drive motors for a sun gear, a lower surface plate, and an internal gear with an inverter, a mechanical clutch or the like. CONSTITUTION:When works and carriers 4 are robot-loaded/unloaded, the rotation of the carriers 4 which may cause the displacement of the work during the connection and loading to the carrier 4 unit with a gear left engaged is prevented by the synchronous rotation of a sun gear 3, a lower surface plate 2, and an internal gear 1. In addition, a group of fluid feeding nozzles 26 of an upper surface plate 20 are matched with the deployment phase of the carrier 4 in advance, a groups of nozzles 26 are overlapped on the carriers 4 and stopped almost simultaneously when the carriers 4 on the lower surface plate 2 are stopped, a small amount of liquid is injected from the nozzles 26 in contact with surfaces of all the works, and immediately afterward the process is switched to air pressurization. Under the condition thus pressurized by air, the upper surface plate 20 is lifted, and the works are removed.