REACTION GAS SAMPLE INTRODUCTION SYSTEM FOR MASS SPECTROMETER OF INDUCTIVE COUPLING PLASMA

摘要

PURPOSE: To enable a reaction components, particularly trimethyle gallium to be analyzed at high precision by maintaining the conservation of composition of the reaction gas or vapor within a torch immediately in front of a chamber where dissociation is carried out until the reaction gas or vapor is mixed with spray stream. CONSTITUTION: A torch 1 feeds, independently in a mixing chamber 10, water, vapor having dissolving power or spray steam of plasma gas including its aerosol, so as to mix a sample therein in this way. And when a mixture sample thermally dissolved before being led in an analyzer is led a plasma forming device 5, outer fittings of plasma gas surrounding the mixture sample is maintained. Accordingly, reaction gas vapor is prevented from mixing in the spray gas in a sprayer 8 or in aerosol so that any defect of no mixing may be prevented. Therefor, the conservation of the composition of the reaction gas or vapor is maintained until it is mixed with the spray stream in the torch 1 immediately in front of a chamber 5A in which dissociation, for instance, thermal dissociation, is carried out.